Nanomechanical Sensor

What are “Nanomechanical Sensors”?

  • Nanomechanical sensors detect target substances mechanically.
  • It means, nanomechanical sensors respond to the “volume” or “mass” change induced by the adsorption of target substances.
  • There are no substances which do not have volume and mass, thus nanomechanical sensors can detect almost any kind of substance.
  • Owing to such intrinsic versatility, nanomechanical sensors are expected as a new sensor platform for various applications including medical, security, and environmental applications.


Why “Nano” mechanical sensors?

  • You can find lots of “nano” in this kind of sensor, for example, the mechanical motion (deformation, deflection, etc…) of nanomechanical sensors is typically in the range of nano-meter.
  • Technically, it is impossible to understand or operate nanomechanical sensors without “nanotechnology” in terms of fabrication, read-out, and analysis.
  • It would be better to notice that the size of sensing element is not necessarily in nano-meter range. Rather, it is usually in micro-meter range.


How do “Nanomechanical Sensors” look like?

  • The most representative structure is a “cantilever“.


The optimized “Nanomechanical Sensor”

  • Recently, we made a comprehensive optimization of a nanomechanical sensor to fulfill the requirements for practical applications such as sensitivity, stability, size, cost, etc.
  • Then, we successfully developed a Nanomechanical Membrane-type Surface Stress Sensor (MSS) shown below:


The MSS consists of a thin adsorbate membrane suspended by four constricted sensing bridges along the rotation axes of silicon crystal, composing a full Wheatstone bridge for the electric read-out.

The sensitivity of MSS reached a similar range with that of optically read-out cantilevers (limit of detection ~0.1 mN/m).


Press release
English (NIMS, MANA)
Japanese (NIMS, MANA)